Innovative Specimen Preparation Method for TEM / STEM / SEM / EPMA / AUGER.The Ion Slicer can prepare thin-film specimens without solvents or chemicals and requires no prior treatment of the specimen other than rectangular slicing (no disc grinding or dimple grinding).The Ion Slicer prepares thin-film specimens faster and easier than conventional preparation tools. A low-energy, low-angle Ar ion beam irradiates the specimen while a thin shield belt allows low-angle irradiation of the Ar ion beam drastically reducing ion-beam irradiation damage to the specimen.