JSM-7200F has much higher spatial resolution than the conventional models at both high and low accelerating voltages by applying the technology used for “In-Lens SchottkyPlus”, the electron optics equipped on our flagship-model, JSM-7800FPRIME, and by incorporating TTLS (Through-The-Lens System). The maximum probe current of 300 nA is also guaranteed because of the above mentioned features. Thus, JSM-7200F is a next-generation multi-purpose FE-SEM that has capability of high resolution observation, high throughput analysis, ease of use, and expandability.