The JED-2300 Analysis Station Plus, an EDS system to perform elemental analysis by detecting characteristic X-rays generated from a specimen, was developed based on the design concept of “Seamless from Observation to Analysis” using many years of experience of JEOL in electron optics and EDS. This EDS system is fully integrated with our SEMs, FIB-SEMs and TEMs for comprehensive data management (microscope images and X-ray data) with an easy-to-understand user interface. For FIB-SEM systems equipped with motor drive stages, data management over large areas is facilitated with visualized operations, such as microscope images with different magnification or different stage position, and locations of elemental maps.
