It is a high specification Auger electron spectrometer with a hemispherical analyzer to provide high throughput analysis of the chemical bonding state at nano to micro areas, and a field emission electron gun also used for EPMA, because it can deliver a large, stable electric current The highly precise eucentric specimen stage makes it possible to perform the previously-impossible analysis of insulators. This in combination with the floating type ion gun offers the versatility to handle any specimen, such as metals and insulation materials, to obtain composition information to and chemical information.
